团队简介

The team is committed to solving the key scientific problems and common technical problems in the field of self driving sensing microsystems, focusing on the research on the enhancement mechanism and realization method of the force electrical coupling effect of micro nano sensitive materials and energy transfer structures, proposing innovative research ideas on the integration of heterogeneous functional materials and the combination of multiphase energy transfer mechanisms, effectively integrating the advantages of various phase functional materials and energy transfer mechanisms in terms of mechanical and electrical characteristics, and realizing functional complementation and collaborative enhancement, The system revealed the output enhancement mechanism and sensitive mechanism of the force electric conversion effect of multiphase composite materials and transducer mechanisms, and solved common key technologies such as wafer level heterointegration of ferroelectric functional materials and precise regulation of electric domains, design and manufacture of highly sensitive mechanical sensors (piezoelectric MEMS bionic vector hydrophone and high-g accelerometer), highly sensitive sensing of weak stress distribution, highly efficient micro energy capture, wireless passive intelligent monitoring of microsystems, It provides core basic theories and key technical support for the development of self driving sensing microsystems, and relevant research achievements are applied to scientific and technological Winter Olympics, unattended, smart mines, individual equipment, aerospace exploration and other fields.