Jing Zhen Qiang
- Legal representative of the Executive Director of the Institute
- Overall preside over the work of the Institute
- In charge of administration, finance, assets and transformation of scientific and technological achievements
Zhang Bao Shun
- The vice president of the institute is in charge of personnel work
- Director of micro nano processing platform
Sun Qian
- The vice president of the institute is in charge of scientific research
- Director of Device Research Department